| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a wafer holding device that prevents a partial area from being incapable of being checked due to the wafer holding device.SOLUTION: A wafer holding device includes clamp pads 2a and 2b for holding an end surface of a wafer W with no gap in between throughout the perimeter of the wafer W. A shape of a part 21, which is brought into contact with an end surface of the wafer W of the clamp pads 2a and 2b is composed of an arc identical to an outer peripheral shape of the wafer W. The part 21, which is brought into contact with the end surface of the wafer W of the clamp pads 2a and 2b is deformed or displaced so that the clamp pads 2a and 2b and the end surface of the wafer W can be brought into intimate contact with each other.</p> |
