| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a substrate processing apparatus which inhibits the deterioration of the facility operation that results from contamination and damage of a temperature sensor, improves the operation efficiency, and achieves high reliability.SOLUTION: A MOVPE device includes: a susceptor 2 on which a semiconductor substrate that is a processed object is placed; a cover plate 3 which is disposed facing the susceptor 2 so as to form a clearance 10 between itself and the susceptor 2; a light pipe 4 which is disposed on the cover plate 3 and measures a temperature of the susceptor 2; and an interruption wall 11 which interrupts the clearance 10 at a position between an end part of the susceptor 2 and the light pipe 4.</p> |
