发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device capable of preventing short-circuiting between a gate electrode and a source/drain region of a transistor, and to provide a method of manufacturing the semiconductor device.SOLUTION: In a semiconductor device DV, a first insulating layer HM1 which is formed on a gate electrode GE and contains nitride silicon has, on an upper surface thereof, a recess SL formed in a region above a second electrode layer GE2 containing silicide of the gate electrode GE.
申请公布号 JP2015060861(A) 申请公布日期 2015.03.30
申请号 JP20130191922 申请日期 2013.09.17
申请人 RENESAS ELECTRONICS CORP 发明人 MAKI YUKIO
分类号 H01L21/8244;H01L27/11 主分类号 H01L21/8244
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