| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device which inhibits a leakage current occurring between a contact plug and a neighboring bit line.SOLUTION: A semiconductor device comprises: a semiconductor substrate 1; a first contact plug 6 which has a diameter size at an upper end larger than a diameter size at a lower end; a first insulation film 4 which covers the first contact plug 6; a second contact plug 9 with a lower end being joined to the upper end of the first contact plug 6 and which has a diameter size at an upper end smaller than a diameter size at the lower end; a second insulation film 7 which covers the second contact plug 9; a wiring layer 13 with a lower end being joined to the upper end of the second contact plug 9; third insulation films 10, 11 which cover the wiring layer 13; and a stepped part 6a formed at a part of the upper end of the first contact plug 6, where the lower end of the second contact plug 9 does not cover. |
