| 摘要 |
PROBLEM TO BE SOLVED: To provide a nozzle cleaning device, a coating device, and a nozzle cleaning method which can securely clean a slit-like coating liquid discharge port and its periphery of a slit nozzle, and a sealing member.SOLUTION: Each of an upper liquid droplet jetting part 40a and a lower liquid droplet jetting part 40b of a nozzle cleaning device 31 includes first and second plate-like members 41, 42 for forming a slit-like air discharge port, and a third plate-like member 43 which is arranged opposite to the second plate-like member 42 and forms a slit-like cleaning liquid discharge port. A liquid droplet of a cleaning liquid is formed by mutually mixing compressed air discharged from the air discharge port formed between the first plate-like member 41 and the second plate-like member 42, and a cleaning liquid discharged from a cleaning liquid discharge port formed between the second plate-like member 42 and the third plate-like member 43. The liquid droplet is jetted to a sealing member 61 through a slit nozzle 3. |
