METHOD OF MANUFACTURING ULTRASONIC THICKNESS SENSOR, AND ULTRASONIC THICKNESS SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing an ultrasonic thickness sensor and an ultrasonic thickness sensor, capable of preventing breakage and peeling of a sintering material layer due to dry shrinkage and achieving a highly-sensitive piezoelectric sensor.SOLUTION: A method of manufacturing an ultrasonic thickness sensor includes the steps of: thermally processing lead zirconate titanate (PZT) of a powder at a temperature not less than 1000°C and not more than 1200°C (thermal processing step P1); pulverizing the PZT thermally processed by the thermal processing step P1 (pulverizing step P2); forming a slurry by mixing the PZT pulverized by the pulverizing step P2 with a sol of the PZT (slurry forming step P3); forming a sintering material layer by depositing the slurry formed in the slurry forming step 3 on a first electrode (depositing step P4); obtaining a piezoelectric ceramic precursor by sintering the sintering material layer (sintering step P5); obtaining a piezoelectric ceramic by polarizing the piezoelectric ceramic precursor (polarizing step P6); and forming a second electrode on the piezoelectric ceramic (electrode forming step).