| 摘要 |
<p>Disclosed is a method for dry cleaning which removes contaminations on an edge part of glass. The dry cleaning method comprises the steps of: using a laser beam generating unit to generate a laser beam; using a laser beam controlling unit to control at least one among the cross sectional size and the sectional shape of the laser beam; and using a laser beam irradiating unit to irradiate the contaminations on the edge part of the glass with the laser beam having 10^5 W (=J/sec) or more of a pulse peak power.</p> |
