发明名称 |
TERMINAL FOR MECHANICAL SUPPORT OF A HEATING ELEMENT |
摘要 |
<p>A terminal for mechanical support of a heating element, includes a base device, a mounting device, the mounting device adapted to support the heating element, and a support device connecting the base device to the mounting device, the support device allowing displacement of the heating element about a radial axis and less than about 10% displacement of the heating element about a tangential and/or axial axis.</p> |
申请公布号 |
SG11201500826V(A) |
申请公布日期 |
2015.03.30 |
申请号 |
SG11201500826V |
申请日期 |
2013.08.05 |
申请人 |
PLANSEE SE;VEECO INSTRUMENTS INC. |
发明人 |
PLANKENSTEINER, ARNO;FEIST, CHRISTIAN;BOGUSLAVSKIY, VADIM;GURARY, ALEXANDER I.;CHANG, CHENGHUNG PAUL |
分类号 |
C23C16/458;C23C16/46;H01L21/67 |
主分类号 |
C23C16/458 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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