| 摘要 |
PROBLEM TO BE SOLVED: To provide a spiral coating applicator capable of simplifying the cleaning process of a nozzle.SOLUTION: According to one embodiment, a spiral coating applicator includes: a stage; a nozzle; a moving unit; a gas supply part; a cleaning fluid supply part; and a nozzle cleaning part. The stage includes a placement surface on which a coating object is placed. The nozzle discharges a liquid to the coating object placed on the stage. The moving unit moves the nozzle relative to the stage. The gas supply part supplies a gas. The cleaning fluid supply part supplies a cleaning fluid. The nozzle cleaning part has a gas supply port and a cleaning fluid supply port, jets the gas supplied from the gas supply part from the gas supply port to the nozzle, and discharges the cleaning fluid supplied from the cleaning fluid supply part from the cleaning fluid supply port to the nozzle. |
