| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a pattern inspection sheet for performing visual inspection of a pattern without an error in a short time.SOLUTION: In order to perform visual inspection of the size such as the remaining line width of a defective portion of a pattern, a pattern inspection sheet 7 is used, which has scales 71a, 71b, and 71c and a mark 75 for calibration formed on a transparent sheet. When an operator performs visual inspection, the operator displays a pattern on a display unit first, sets the magnification ratio of the display image so that the size of a mark on a display image coincides with the size of the mark 75, and overlaps the scales 71a, 71b, and 71c on the pattern to measure the size of the pattern.</p> |
