ACTIVE VIBRATION ISOLATOR

摘要

PROBLEM TO BE SOLVED: To provide an active type vibration isolator always having a high vibration-isolation performance without depending on changes in peripheral temperature environment.SOLUTION: The active vibration isolator comprises: a passive type vibration-isolation part which is disposed between a floor and a supported object and passively reduces vibration applied to the supported object from the floor; a force measurement part which is disposed in series with the passive type vibration-isolation part and measures the force applied to the passive type vibration-isolation part; a relative displacement measurement part for measuring the relative displacement of the supported object relative to the floor; a low frequency component removal filter for removing low frequency components including accidental error components from the output of the force measurement part; a compensator which estimates the force applied to the passive type vibration-isolation part based on the output of the relative displacement measurement part to thereby compensate the low frequency components removed by the low frequency component removal filter and creates an actuator control signal; and an actuator which is installed between the floor and the supported object and in parallel with the passive type vibration-isolation part and the force measurement part and compensates the relative displacement of the supported object for the floor by using the actuator control signal as an input.