| 摘要 |
PROBLEM TO BE SOLVED: To provide a structure capable of suppressing the movement of a movable electrode in a surface direction parallel to the surface of a substrate in a seesaw type capacitance type acceleration sensor.SOLUTION: A first spring part 70 includes: a first linear beam part 71 inclined to a perpendicular direction perpendicular to the longitudinal direction of a pair of connection parts 53 in a plane direction parallel to a surface 23 of a substrate 20; and a second linear beam part 72 inclined to the direction opposite to the first beam 71 for the perpendicular direction. The first beam part 71 and the second beam part 72 are arranged in such a manner that a spacing between the sides of both fixing parts 60 becomes narrower than the spacing between the sides of the pair of connection parts 53, thereby being arranged in a V-shape. In the same way, a second spring part 80 has a third beam part 81 and a fourth beam part 82, and a third beam part 81 and a fourth beam part 82 are also arranged in the V-shape. |
