| 摘要 |
<p>The present invention relates to a method of fabricating a gas sensor nanoarray including a metal oxide nanowire pattern. The method of fabricating a gas sensor nanoarray includes forming a plurality of electrode pairs having a source electrode and a drain electrode on a substrate; forming an aligned metal oxide precursor/organic complex nanowire pattern on the source electrode and the drain electrode; and forming a nanowire pattern having a metal oxide by heating the metal oxide precursor/organic complex nanowire pattern. According to the present invention, a gas sensor having improved electric charge mobility can be provided, a position and a direction of the metal oxide nanowire can be accurately modified, fabricating a large-area and high-performance nanowire gas sensor array is possible, and when forming the nanowire through an electro-hydrodynamic nanowire printer, nanowire forming speed is highly fast so the nanowire gas sensor can be fabricated faster than conventional methods.</p> |
