| 摘要 |
PROBLEM TO BE SOLVED: To downsize an inertial sensor to which a detection axis for detecting a physical quantity in a particular direction is set.SOLUTION: In a laminated substrate 20 in which a plurality of substrates 24 are laminated, has notched parts 25 in which a part of side faces 22a, 22b out of side face 22, which face a direction parallel with a detection axis of a sensor chip 30, is recessed in a direction perpendicular to the detection axis out of a surface direction parallel with a surface 21. The notched parts 25 are formed corresponding to the pair of side faces 22a, 22b out of the side face 22 which face the direction parallel with the detection axis. Further, the notched parts 25 formed on one substrate 24a are smaller than the notched parts formed on the other substrate 24b. A case 10 has ribs 15 in which a part of a wall part 13 of a hole part 11 is protruded in a direction perpendicular to the detection axis out of the surface direction. The ribs 15 contact the direction parallel with the detection axis out of the notched parts 25 formed on one substrate 24a and are fitted into the notched parts 25. |
