OPTICAL WAVEGUIDE DEVICE AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an optical waveguide device capable of separating the wavelength of any of a TM wave and a TE wave without depending on the polarization.SOLUTION: The optical waveguide device includes a silicon substrate 10, a clad layer 12, an input/output unit 30, an output unit 36, an MMI type waveguide unit 32, and a grating unit 34 disposed in the center part of the MMI type waveguide unit 32. The input/output unit 30 includes an input port 20 and output port 22. The input/output unit 30 and output unit 36 have a rim portion whose width is varied in a tapered shape. Each width is set so that, at a certain position of the tapered structure, a phase matching condition is satisfied in which the conversion between a TM wave basic propagation mode and a TE wave primary propagation mode is performed.