| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a film thickness measurement method and apparatus which are capable of accurately measuring a film thickness, such as a film having birefringence.SOLUTION: A film thickness measurement method has: a step of irradiating an object to be measured with continuous light to obtain optical spectrum of its reflected light or transmitted light; a step of obtaining power spectrum from the optical spectrum by Fourier transform; and a step of obtaining a film thickness of the object to be measured based on a middle point M between a first characteristic point S regarding a peak on the shortest wavelength side and a second characteristic point L regarding a peak on the longest wavelength side with respect to split peaks appeared in the power spectrum.</p> |
