| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a rotary vacuum pump capable of suppressing occurrence of various kinds of failure due to dew condensation.SOLUTION: A rotary vacuum pump includes: a vacuum pump part including a fixed side exhaust part which is provided in a pump casing and which generates an exhaust action in cooperation with a rotary side exhaust part; a power supply part which is a power supply device of the vacuum pump part; a pump side cooling device in which a pump side cooling flow passage is provided having a pump side refrigerant inlet, which is an inlet for a refrigerant, and a pump side refrigerant outlet, which is an outlet for the refrigerant, and which cools the vacuum pump part with the refrigerant; a power supply side cooling device in which a power supply side cooling flow passage is provided having a power supply side refrigerant inlet, which is an inlet for the refrigerant, and a power supply side refrigerant outlet, which is the outlet for the refrigerant, and which cools the power supply part with the refrigerant; and a connection flow passage for connecting the pump side refrigerant outlet and the power supply side refrigerant inlet. The power supply side cooling device is provided in the downstream regarding a flow of the refrigerant with respect to the pump side cooling device.</p> |
