| 发明名称 |
HEATING ELEMENT FOR A PLANAR HEATER OF A MOCVD REACTOR |
| 摘要 |
<p>A heating element includes a heating body which is directly covered at least partly with a porous sintered coating, wherein the heating body and the porous sintered coating each includes at least 90% by weight of tungsten.</p> |
| 申请公布号 |
SG11201500815Y(A) |
申请公布日期 |
2015.03.30 |
| 申请号 |
SG11201500815Y |
申请日期 |
2013.08.05 |
| 申请人 |
PLANSEE SE;VEECO INSTRUMENTS INC. |
发明人 |
MARTINZ, HANS-PETER;SULIK, MANFRED;BOGUSLAVSKIY, VADIM |
| 分类号 |
C23C16/46;H05B3/14;H05B3/24 |
主分类号 |
C23C16/46 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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