MAGNETIC OXYGEN ANALYZER, AND SENSOR UNIT FOR MAGNETIC OXYGEN ANALYZER

摘要

PROBLEM TO BE SOLVED: To provide a magnetic oxygen analyzer capable of measuring oxygen concentration in gas to be measured at high sensitivity while a manufacturing cost is reduced.SOLUTION: A flow rate sensor 21 arranged in a bypass flow passage communicated with an auxiliary gas flow passage of a magnetic oxygen analyzer comprises: a substrate 21; a sensor element 24 and bridge resistances 25a, 25b mounted on the substrate; wiring patterns 27 to 30 formed on the substrate; bonding pads 27a to 30a provided for end parts of the wiring patterns; and lead wires 31a to 31d connected between the sensor element 24 and the bonding pads 27a to 30a by using a wire bonding machine.