| 摘要 |
The purpose of the present invention is to suppress thermal deformation from alignment to cutting by previously cooling an object to be cut at the same temperature as a set temperature of a water jet. In a twin cut table-type cutting device, cool air is supplied from a cool air generation unit to a loader. A substrate which is firmly attached to a fixing unit and is completely sealed is cooled by having cool air flow in a passage for cooling formed in a cooling part in the loader. The sealed substrate is contracted to be in the same state as the state of cutting by previously cooling the sealed substrate at the same temperature as a set temperature of a water jet. Alignment is performed when a substrate is contracted, thereby accurately cutting the substrate along a cutting line without error from alignment to cutting. |
