发明名称 |
Megasonisk bearbejdningsapparat med frekvensfejning af tykkelse-modus-transducere |
摘要 |
<p>A megasonic processing apparatus and method has one or more piezoelectric transducers operating in thickness mode at fundamental resonant frequencies of at least 300 KHz. A generator powers the transducers with a variable-frequency driving signal that varies or sweeps throughout a predetermined sweep frequency range. The generator repeatedly vanes or sweeps the frequency of the driving signal through a sweep frequency range that includes the resonant frequencies of all the transducers.</p> |
申请公布号 |
DK1997159(T3) |
申请公布日期 |
2015.03.30 |
申请号 |
DK20070753508T |
申请日期 |
2007.03.18 |
申请人 |
MEGASONIC SWEEPING INCORPORATED |
发明人 |
GOODSON, MICHAEL J. |
分类号 |
B06B1/02;B08B3/12 |
主分类号 |
B06B1/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|