发明名称 POLISHING COMPOSITION AND SUBSTRATE FABRICATION METHOD USING SAME
摘要 <p>A polishing composition contains abrasive grains, a surface adsorptive agent, and water, and is used for polishing an object formed of a crystalline metallic compound. The polishing composition reduces defects on a polished surface of the object compared to a composition obtained by excluding the surface adsorptive agent from the polishing composition.</p>
申请公布号 KR20150032697(A) 申请公布日期 2015.03.27
申请号 KR20157000644 申请日期 2013.06.17
申请人 FUJIMI INCORPORATED 发明人 TANIGUCHI MEGUMI;MORINAGA HITOSHI;SERIKAWA MASAYUKI
分类号 C09K3/14 主分类号 C09K3/14
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