| 摘要 |
<p>The present invention relates to a substrate processing apparatus and methods for manufacturing a substrate for an electronic device and a flat panel display device using the same. The substrate processing apparatus according to the embodiment of the present invention includes a first electrode part on which a substrate is loaded, a second electrode part which faces the first electrode part and forms plasma, and a third electrode part which is located outside the second electrode part and is connected to a DC power source unit.</p> |
