| 摘要 |
<p>An MEMS component according to the present invention comprises: a membrane; a weight body connected to the membrane; and a support part which is connected to the membrane and supports the weight body in a floating state to be displaced. The membrane has an insulating adhesion layer in the center. An upper electrode and an upper piezoelectric body are arranged on one side of the membrane, and a lower electrode and a lower piezoelectric body are arranged on the other side of the membrane.</p> |
