METHOD FOR MANUFACTURING ORGANIC THIN-FILM ELEMENT, APPARATUS FOR MANUFACTURING ORGANIC THIN-FILM ELEMENT, METHOD FOR FORMING ORGANIC FILM, AND METHOD FOR MANUFACTURING ORGANIC EL ELEMENT

摘要

A method for reducing an internal pressure of a vacuum chamber while preventing impurity contamination within the vacuum chamber as much as possible. The method includes: rough pumping reducing an internal pressure of a vacuum chamber (1) by using a roughing pump (2), the roughing pump (2) being a mechanical pump that is capable of reducing the internal pressure of the vacuum chamber (1) to be less than 15 Pa; main pumping reducing the internal pressure of the vacuum chamber (1) by using a main pump (3) after the rough pumping, the main pump (3) being a non-mechanical pump. Transition from the rough pumping to the main pumping is performed when the internal pressure of the vacuum chamber (1) is no less than 15 Pa.