High-Resolution Scanning Microscopy

摘要

Microscope and method for high resolution scanning microscopy of a sample, wherein
the sample is illuminated;at least one point spot or line spot, which is guided in a scanning manner over the sample, is imaged into a still image; wherein the spot is imaged in a diffraction limited manner into the still image with magnification, and the still image lies still in a plane of detection;the still image is detected for different scan positions with a spatial resolution, which, taking into consideration the magnification, is at least twice as high as a full width at half maximum of the diffraction-limited still image, so that a diffraction pattern of the still image is detected;the diffraction pattern of the still image is evaluated for each scan position, and an image of the sample is generated that has a resolution that is increased beyond the diffraction limit, wherein a detector array is provided that has pixels and is larger than the still image; andradiation of the still image from the plane of detection is redistributed in a non-imaging manner among the pixels of the detector array;wherein at least two redistribution elements are provided that are exposed in parallel to the detection light, and wherein the detection light is different at least partially with respect to its spectral composition, and the radiation from the at least two redistribution elements reaches the pixels of a detector array.

主权项

1. A microscope for high resolution scanning microscopy of a sample comprising
a lighting device for illuminating a sample, an imaging device for scanning at least one point spot or line spot across the sample and for imaging the point spot or line spot into a diffraction-limited, stationary still image with magnification into a plane of detection, a detector device for detecting the still image in the plane of detection for different scan positions with a spatial resolution, which, taking into consideration the magnification, is at least twice as high as a full width at half maximum of the diffraction-limited still image, an evaluation device for evaluating a diffraction pattern of the still image for the scan positions from data of the detector device and for generating an image of the sample, said image having a resolution that is increased beyond the diffraction limit, said detector device having a detector array, which has pixels and is larger than the still image, and a non-imaging redistribution element, which is disposed upstream of the detector array and distributes the radiation from the plane of detection in a non-imaging manner among the pixels of the detector array.