CAPACITOR DEVICE

摘要

In some embodiments, a capacitor device includes a metal-oxide-metal (MOM) capacitor array and a varactor array configured overlapping with the MOM capacitor array. The MOM capacitor array includes a first MOM capacitor unit. The first MOM capacitor unit includes a first electrode pattern and a second electrode pattern in a first metallization layer. The first electrode pattern includes a plurality of first fingers and a first bus interconnecting the plurality of first fingers. The second electrode pattern includes a plurality of second fingers and a second bus interconnecting the plurality of second fingers. The varactor array includes a first varactor unit. The first varactor unit includes a first electrode contacting region and a second electrode contacting region. The first electrode pattern contacts the first electrode contacting region. The second electrode pattern contacts the second electrode contacting region.

主权项

1. A capacitor device, comprising:
a metal-oxide-metal (MOM) capacitor array comprising:
a first MOM capacitor unit comprising:
a first electrode pattern and a second electrode pattern in a first metallization layer, the first electrode pattern comprising a plurality of first fingers and a first bus interconnecting the plurality of first fingers, and the second electrode pattern comprising a plurality of second fingers and a second bus interconnecting the plurality of second fingers; and a varactor array configured overlapping with the MOM capacitor array, the varactor array comprising:
a first varactor unit comprising:
a first electrode contacting region; anda second electrode contacting region,wherein
the first electrode pattern contacts the first electrode contacting region and the second electrode pattern contacts the second electrode contacting region.