发明名称 ENHANCEMENT-MODE III-N TRANSISTOR WITH N-POLARITY AND METHOD OF FABRICATING THE SAME
摘要 <p>Enhancement -mode III-N transistor with N-polarity consisting of the following layers, from the bottom: a bottom barrier layer ( 1 ); a channel layer ( 2 ); an upper barrier layer ( 3 ), the chemical composition of which is different from the composition of the bottom barrier layer; and a dielectric insulating layer ( 4 ), while the upper barrier layer/channel layer interface exhibits a negative polarization charge with an absolute value larger than the positive polarization charge at the channel layer/bottom barrier layer interface, and the transistor threshold voltage is freely adjustable.</p>
申请公布号 WO2015009249(A9) 申请公布日期 2015.03.26
申请号 WO2014SK00011 申请日期 2014.04.30
申请人 ELEKTROTECHNICKY USTAV SAV;CENTRUM VEDECKO-TECHNICKYCH INFORMACII SR (CVTI SR) 发明人 KUZMIK, JÁN
分类号 H01L29/778;H01L21/336;H01L29/04;H01L29/20;H01L29/51 主分类号 H01L29/778
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