METHOD FOR MANUFACTURING INK JET HEAD AND INK JET HEAD

摘要

Provided are a method for manufacturing an ink jet head and an ink jet head. The method comprises: arranging a vibration plate (202) on the lower surface of a substrate (201); arranging a piezoelectric actuator (203) on the surface of the vibration plate; arranging a protective film (204) on the surface of the piezoelectric actuator so as to make the protective film cooperate with the vibration plate to seal the piezoelectric actuator for preventing the piezoelectric actuator from being corroded; etching the substrate so as to form a groove (205) on the substrate at the place corresponding to the piezoelectric actuator and to form a liquid supply hole (206) on the substrate and the vibration plate; and forming a pressure chamber (207) and a nozzle hole (208) on the lower surface of the vibration plate so as to make the pressure chamber cover the vibration plate at the place where the piezoelectric actuator is arranged, and to make the pressure chamber communicate with the nozzle hole and the liquid supply hole. The method simplifies the process steps, and improves rate of finished products of the ink jet head.