| 摘要 |
<p> This transport-in/transport-out apparatus (100) is provided with a carrier stage (2) having protruding parts (3, 4) used to position a transported object (1), and a transfer robot (50) for transporting the transported object (1) into and out from a treatment apparatus (200). The transfer robot (50) includes a retainer part (5) for retaining the transported object (1), a drive unit (22) for moving the retainer part (5), and a controller (21) for controlling the drive unit (22). The controller (21) controls the drive unit (22) in such a way that the carry position at which the transported object (1) is carried on the transported object (1) retained by the retainer part (5) subsequent to treatment is a position further away from the protruding parts (3, 4) than is the carry position when the transported object (1) which was positioned by the protruding parts (3, 4) prior to treatment is removed by the retainer part (5), so that the transported object (1) subsequent to treatment by the treatment apparatus (200) is carried on the carrier stage (2) without interfering with the protruding parts (3, 4).</p> |
