ATMOSPHERIC IMPACT RESISTANT MOLECULAR PUMP

摘要

An Atmospheric impact resistant molecular pump, comprising a chassis (3) with a motor (9) installed in the center portion thereof; a rotor (2) is attached to the chassis (3); a pump casing (1) is fixedly attached to the rotor (2) and the chassis (3) via screws; an air inlet is provided at the top of the pump casing (1), and an air outlet is provided at the side surface of the chassis (3) near the bottom; the rotor (2) is integrally machined and formed of hard cylindrical aluminum alloy material, and is uniformly provided with 4 to 8 spiral exhaust grooves from top to bottom; an installation layer is provided within the rotor (2), and the upper and lower sides of the installation layer are hollow cavities; and a conical through hole is provided in the center of the installation layer; and the portion of the motor spindle (8) extending to the upper portion of the chassis is inserted into and tightly fits the conical through hole on the installation layer of the rotor. The molecular pump has a simple structure, is easy to manufacture and maintain, and has low production cost, high rotor strength and atmospheric impact resistance.