| 摘要 |
The invention relates to a method for monitoring (S) the energy density of a laser beam (3) using parameters of the laser beam (3) including the following steps: regularly applying the laser beam (3) to a reference substrate and measuring (S4), with each application, the resulting light intensity; identifying (S6, S7, S8) a change in the light intensity on the reference substrate between at least two measurements; and, when the change in the light intensity is higher than a predetermined threshold, determining the unstable parameter or parameters of the energy density of the laser beam (3) (S8). |
