| 摘要 |
<p> Although highly sensitive at detecting some types of defects, a conventional technique has reduced sensitivity to other types of defects. The conventional technique also has drawbacks in that mechanical switching of filters increases the amount of time taken to acquire a plurality of images under different detection conditions. The present invention is a defect viewing device provided with SEM and optical microscopes, and a control unit, the defect viewing device characterized in that the optical microscope is provided with: a radiating system for radiating light to a sample; and a detection system having a spatial filter, a spatial shape of which can be electrically controlled, and a distributed polarizer, a polarization state of which can be electrically controlled, for detecting a signal based on light from the sample irradiated by the radiating system; and the control unit generates a synchronization signal (202), controls and electrically switches the polarization state of the distributed polarizer and the spatial shape of the spatial filter on the basis of the generated synchronization signal (207, 206), and processes an image detected by the detection system in a plurality of combinations of polarization states of the distributed polarizer and spatial shapes of the spatial filter (123).</p> |
