发明名称 STRAIN SENSING ELEMENT, PRESSURE SENSOR, MICROPHONE, BLOOD PRESSURE SENSOR, AND TOUCH PANEL
摘要 According to one embodiment, a strain sensing element is provided on a film unit configured to be deformed. The strain sensing element includes a functional layer, a first magnetic layer, a second magnetic layer, and a spacer layer. The functional layer includes at least one of an oxide and a nitride. The second magnetic layer is provided between the functional layer and the first magnetic layer. A magnetization of the second magnetic layer is variable in accordance with a deformation of the film unit. The spacer layer is provided between the first magnetic layer and the second magnetic layer. At least a part of the second magnetic layer is amorphous and includes boron.
申请公布号 US2015082918(A1) 申请公布日期 2015.03.26
申请号 US201414471694 申请日期 2014.08.28
申请人 Kabushiki Kaisha Toshiba 发明人 FUJI Yoshihiko;FUKUZAWA Hideaki;KAJI Shiori;HORI Akio;NAGATA Tomohiko;HARA Michiko;HIGASHI Yoshihiro;YUZAWA Akiko
分类号 G01L1/12;G01L9/16;A61B5/021;G01L9/00 主分类号 G01L1/12
代理机构 代理人
主权项 1. A strain sensing element provided on a film unit configured to be deformed, the strain sensing element comprising: a functional layer including at least one of an oxide and a nitride; a first magnetic layer; a second magnetic layer provided between the functional layer and the first magnetic layer, a magnetization of the second magnetic layer being variable in accordance with a deformation of the film unit; and a spacer layer provided between the first magnetic layer and the second magnetic layer, at least a part of the second magnetic layer being amorphous and including boron.
地址 Minato-ku JP