发明名称 OPTICAL ELEMENT HOLDING DEVICE, LENS BARREL, AND EXPOSURE DEVICE
摘要 <p>An optical element holding apparatus includes an annular vibration attenuation plate, which covers a peripheral portion of a lens, and a connection member, which is formed of a damping alloy and which fixes the vibration attenuation plate to a frame body in a state of non-contact with the surface of the lens. The vibration attenuation plate and nitrogen gas in a clearance between the vibration attenuation plate and the surface of the lens form a squeeze film damper.</p>
申请公布号 KR101506358(B1) 申请公布日期 2015.03.26
申请号 KR20097024167 申请日期 2008.04.21
申请人 发明人
分类号 G02B7/00;G02B7/02;G03F7/20;H01L21/027 主分类号 G02B7/00
代理机构 代理人
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