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发明名称
摘要
申请公布号
JPS438022(Y1)
申请公布日期
1968.04.10
申请号
JP19650020422U
申请日期
1965.03.15
申请人
发明人
分类号
H01L21/52;H01L21/58;H01L23/12;(IPC1-7):H01L23/12
主分类号
H01L21/52
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