发明名称 PASSIVATING ULTRA-THIN AZO WITH NANO-LAYER ALUMINA
摘要 A method of making an electrical conductor includes depositing an ultra-thin layer including aluminum-doped zinc oxide layer on a surface and using atomic layer deposition to deposit a nano-layer including alumina in contact and conformal with a surface of the ultra-thin layer including aluminum-doped zinc oxide.
申请公布号 US2015086709(A1) 申请公布日期 2015.03.26
申请号 US201314037862 申请日期 2013.09.26
申请人 Burberry Mitchell Stewart;Tutt Lee William 发明人 Burberry Mitchell Stewart;Tutt Lee William
分类号 C23C16/06;H01B13/00;C23C16/40;C23C16/44 主分类号 C23C16/06
代理机构 代理人
主权项 1. A method of forming an electrical conductor, comprising: depositing an ultra-thin layer including aluminum-doped zinc oxide layer on a surface; and using atomic layer deposition to deposit a nano-layer including alumina in contact and conformal with a surface of the ultra-thin layer including aluminum-doped zinc oxide.
地址 Webster NY US