发明名称 |
PASSIVATING ULTRA-THIN AZO WITH NANO-LAYER ALUMINA |
摘要 |
A method of making an electrical conductor includes depositing an ultra-thin layer including aluminum-doped zinc oxide layer on a surface and using atomic layer deposition to deposit a nano-layer including alumina in contact and conformal with a surface of the ultra-thin layer including aluminum-doped zinc oxide. |
申请公布号 |
US2015086709(A1) |
申请公布日期 |
2015.03.26 |
申请号 |
US201314037862 |
申请日期 |
2013.09.26 |
申请人 |
Burberry Mitchell Stewart;Tutt Lee William |
发明人 |
Burberry Mitchell Stewart;Tutt Lee William |
分类号 |
C23C16/06;H01B13/00;C23C16/40;C23C16/44 |
主分类号 |
C23C16/06 |
代理机构 |
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代理人 |
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主权项 |
1. A method of forming an electrical conductor, comprising:
depositing an ultra-thin layer including aluminum-doped zinc oxide layer on a surface; and using atomic layer deposition to deposit a nano-layer including alumina in contact and conformal with a surface of the ultra-thin layer including aluminum-doped zinc oxide. |
地址 |
Webster NY US |