Method for Scanning Along a Continuous Scanning Trajectory With a Scanner System

摘要

The invention relates to a method for scanning along a continuous scanning trajectory with a scanner system (100) comprising a first pair of acousto-optic deflectors (10) for deflecting a focal spot of an electromagnetic beam generated by a consecutive lens system (200) defining an optical axis (z) in an x-z plane, and a second pair of acousto-optic deflectors (20) for deflecting the focal spot in a y-z plane being substantially perpendicular to the x-z plane, characterised by changing the acoustic frequency sweeps with time continuously in the deflectors (12, 12′) of the first pair of deflectors (10) and in the deflectors (22, 22′) of the second pair of deflectors (20) so as to cause the focal spot to move continuously along the scanning trajectory.

主权项

1. Method for scanning along a continuous scanning trajectory with a scanner system (100) comprising a first pair of acousto-optic deflectors (10) for deflecting a focal spot of an electromagnetic beam generated by a consecutive lens system (200) defining an optical axis (z) in an x-z plane, and a second pair of acousto-optic deflectors (20) for deflecting the focal spot in a y-z plane being substantially perpendicular to the x-z plane, characterised by changing the acoustic frequency sweeps with time continuously in the deflectors (12, 12′) of the first pair of deflectors (10) and in the deflectors (22, 22′) of the second pair of deflectors (20) so as to cause the focal spot to move continuously along the scanning trajectory.