发明名称 |
LIQUID EJECTING HEAD, LIQUID EJECTING APPARATUS, AND PIEZOELECTRIC ELEMENT |
摘要 |
A piezoelectric element which includes an adhesion layer made of composite oxide having perovskite structure including at least one of bismuth, manganese, iron, and titanium; a first electrode provided on the adhesion layer and made of metal preferentially oriented in a (100) face; a piezoelectric body layer provided on the first electrode and made of composite oxide having perovskite structure preferentially oriented in the (100) face; and a second electrode provided on the piezoelectric body layer. |
申请公布号 |
US2015085023(A1) |
申请公布日期 |
2015.03.26 |
申请号 |
US201414496382 |
申请日期 |
2014.09.25 |
申请人 |
Seiko Epson Corporation |
发明人 |
SAKAI Tomohiro |
分类号 |
B41J2/045;H01L41/047;H01L41/18;H01L41/053 |
主分类号 |
B41J2/045 |
代理机构 |
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代理人 |
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主权项 |
1. A piezoelectric element comprising:
an adhesion layer made of composite oxide having perovskite structure including at least one of bismuth, manganese, iron, and titanium; a first electrode provided on the adhesion layer and made of metal preferentially oriented in a (100) face; a piezoelectric body layer provided on the first electrode and made of composite oxide having perovskite structure preferentially oriented in the (100) face; and a second electrode provided on the piezoelectric body layer. |
地址 |
Tokyo JP |