| 发明名称 |
FLOW PATH MEMBER, HEAT EXCHANGER INCLUDING THE FLOW PATH MEMBER, AND SEMICONDUCTOR MANUFACTURING APPARATUS INCLUDING THE FLOW PATH MEMBER |
| 摘要 |
A flow path member includes a flow path which has an inlet and an outlet in a base made of ceramics, and a low resistance portion whose surface resistance is less than 1×107 Ω/sq in at least a part of the flow path. |
| 申请公布号 |
US2015084261(A1) |
申请公布日期 |
2015.03.26 |
| 申请号 |
US201314389254 |
申请日期 |
2013.03.28 |
| 申请人 |
KYOCERA Corporation |
发明人 |
Sekiguchi Keiichi;Fujio Kazuhiko;Ishimine Yuusaku |
| 分类号 |
H01L21/683;F28F21/04;F28F13/18 |
主分类号 |
H01L21/683 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A flow path member comprising:
a flow path which includes an inlet and an outlet in a base made of ceramics; and a low resistance portion whose surface resistance is less than 1×107 Ω/sq in at least a part of the flow path. |
| 地址 |
Kyoto-shi, Kyoto JP |
