发明名称 |
BIOSENSING WELL ARRAY WITH PROTECTIVE LAYER |
摘要 |
The present disclosure provides a biological field effect transistor (BioFET) and a method of fabricating a BioFET device. The method includes forming a BioFET using one or more process steps compatible with or typical to a complementary metal-oxide-semiconductor (CMOS) process. The BioFET includes a microwells having a sensing layer, a top metal stack under the sensing layer, and a multi-layer interconnect (MLI) under the top metal stack. The top metal stack includes a top metal and a protective layer over and peripherally surrounding the top metal. |
申请公布号 |
US2015084099(A1) |
申请公布日期 |
2015.03.26 |
申请号 |
US201314033089 |
申请日期 |
2013.09.20 |
申请人 |
Taiwan Semiconductor Manufacturing Company, Ltd. |
发明人 |
Shen Wei-Cheng;Chang Yi-Hsien;Lin Shih-Wei;Cheng Chun-Ren |
分类号 |
G01N27/414 |
主分类号 |
G01N27/414 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
Hsin-Chu TW |