DIELECTRIC BARRIER DISCHARGE REACTOR FOR SURFACE TREATMENT

摘要

A dielectric barrier discharge reactor for surface treatment capable of improving the surface treatment efficiency of an object substrate. A dielectric barrier discharge reactor includes a first and a second driving electrode which are separated by a center slit which a discharge gas is supplied to and are surrounded by each dielectric substance, and a ground electrode which is formed in a discharge space between the first and the second driving electrode and supports the object substrate. The distance between the first and the second driving electrode and the ground electrode is shorter than that between the first driving electrode and the second driving electrode.