| 摘要 |
A synthetic controlled variable (X mix =F 1 (X c )+F 2 (X 2 , X 1 )) is obtained by obtaining a synthetic quantity (X c =±X 2 +²X 1 ) using measurement results (X 2 , X 1 ) of a first and a second measuring instruments and corresponding gains (or transfer function) (±, ²) and synthesizing the synthetic quantity (X c ) and one of the measurement results (X 2 , X 1 ) of the first and the second measuring instruments, respectively, via a high pass filter (F 1 ) and a low pass filter (F 2 ). A feedback control system is structured that obtains a control input (U) using a synthetic controlled variable (X mix ) and a desired value (R), and gives a plant the control input (U). This makes adding of a high pass filter for removing offset of installation position of the first and the second measuring instruments no longer necessary, and allows a driving system which controls robust driving in a high bandwidth of a plate stage (PST) regardless of bandwidth in which resonance appears to be designed. |
