发明名称 METHOD FOR MONITORING FLEXURAL VIBRATIONS OF A PIEZOACTUATOR
摘要 <p>In the method for monitoring flexural vibrations of a piezoactuator, a small-signal spectrum of a piezoactuator, which is provided and mounted for the purpose of exciting longitudinal vibrations, is measured and an excitation of a transverse vibration in the piezoactuator is detected from resonances occurring in the small-signal spectrum.</p>
申请公布号 EP2612374(B1) 申请公布日期 2015.03.25
申请号 EP20110769798 申请日期 2011.09.02
申请人 EPCOS AG 发明人 GABL, REINHARD
分类号 H01L41/053;H01L41/25 主分类号 H01L41/053
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