| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a heat treatment device capable of preventing introduced gas from being mixed between regions. <P>SOLUTION: In the heat treatment device, the inside of a furnace is partitioned into a plurality of regions so that an atmosphere around a workpiece W is different in each of the regions, and the workpiece W is advanced to the partitioned regions in order, and heat treatment is applied to the workpiece W. The heat treatment device includes a gas introduction part 2 for supplying treatment gas in the respective partitioned regions, an exhausting part 3 for exhausting atmospheric gas in the plurality of the partitioned regions, and a purge gas supply part 7. The purge gas supply part 7 is disposed between the adjacent regions, and has injection ports 17a and 17b for injecting purge gas from the upper side to the lower side of the workpiece W. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
