Cassette supplying system

摘要

Disclosed is a cassette supply system provided to be applied to various process environments by handling a cassette from the upper side; economically utilize a space in a process room by utilizing a wide space of an upper area of a chamber inside the process room to supply the cassette; and facilitate automation by a simplified layout. According to an embodiment of the present invention, the cassette supply system comprises: a vehicle unit installed on the ceiling of a processing room having a chamber formed therein to transfer cassettes; a cassette loading unit arranged on the upper area of the chamber and loading the cassettes to be supplied or discharged through a cassette entrance formed on the upper part of the chamber; and a cassette transfer unit loading or unloading the cassette on the cassette loading unit by transferring the cassette one side to the other side between the vehicle unit and the cassette loading unit.