摘要 |
<p>A liquid jet head 1 is provided with a piezoelectric body substrate 2 and a cover plate 8. The piezoelectric body substrate 2 includes a groove row 5 in which ejection grooves 3 penetrating the piezoelectric body substrate 2 from an upper surface US through a lower surface LS and non-ejection grooves 4 open on the upper surface US are alternately arranged in a reference direction K. Common drive electrodes 13a are formed on both side surfaces of each of the ejection grooves 3, and individual drive electrodes 13b are formed on both side surfaces of each of the non-ejection grooves 4. The cover plate 8 is bonded to the upper surface US of the piezoelectric body substrate 2 and includes a liquid chamber 9 communicating with the ejection grooves 3. The cover plate 8 is also provided with first through electrodes 20 which penetrate the cover plate 8 in a thickness direction and are electrically connected to the individual drive electrodes 13b. The cover plate has individual terminals 17 which are placed on a front surface opposite to the piezoelectric body substrate 2 and electrically connected to the first through electrodes 20.</p> |