LASING DEVICE

摘要

Upon starting the lasing device after having a stop state, gas retaining in the gas circulation path and the optical resonator is released through the gas release valve opened by the gas pressure controller. During a time calculated by the open-time calculator in response to the immediately preceding stop time of the lasing device, laser medium gas in the piping between the laser medium gas supply device and the gas supply valve is released, together with the retaining gas, through the gas supply valve opened by the gas pressure controller. The structure reduces costs by using decreased number of valves and suppresses consumption of laser medium gas.