| 摘要 |
<p>The invention relates to measuring devices used in measuring angular velocity, and, more precisely, to vibrating micromechanical sensors of angular velocity. In the solution for a sensor of angular velocity, a mass is suspended using spring structures having non-orthogonal primary and secondary axes such, that an activation in phase with the primary motion is induced in a detection resonator. The angular velocity to be measured is detected from the phase difference between the primary motion and the secondary motion. The structure of the sensor of angular velocity enables reliable measuring with good performance, particularly, in small vibrating micromechanical solutions for a sensor of angular velocity.</p> |
