ABERRATION CORRECTION DEVICE AND LASER MICROSCOPE

摘要

An aberration correction device (3) corrects wave front aberration arising in an optical system that includes an object lens (4) disposed in an optical path for light beams output by a coherent light source (1). The aberration correction device (3) has a symmetrical aberration correction element (3a) that corrects symmetrical aberrations, which are the wave front aberrations that are symmetrical with respect to the optical axis among the wave front aberrations generated in the optical path, and an asymmetrical aberration correction element (3b) that corrects asymmetrical aberrations, which are wave front aberrations that are asymmetrical with respect to the optical axis, generated in light beams incident obliquely on the object lens (4).